ASML to Deliver First High-NA EUV Tool This Year
Anand Tech
SEPTEMBER 6, 2023
Following those R&D efforts, high volume manufacturing of chips using High-NA scanners expected to commence in 2025, when ASML begins shipping the commercial-grade Twinscan EXE:5200 scanner. "A Intel had originally planned to use ASML's High-NA tools for its 18A (1.8 That machine, the 0.55 NA EUV scanner.
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