ASML Ships Industry's First High-NA EUV Litho Scanner To Intel
Anand Tech
DECEMBER 21, 2023
ASML on Thursday said that it had shipped its pilot High-NA EUV scanner to Intel. The Twinscan EXE:5000 extreme ultraviolet (EUV) scanner is AMSL's very first High-NA scanner, and it has eagerly been awaited by Intel, who first placed an order for the machine back in 2018. "It goes to Intel as planned and announced earlier."
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